| A/D |
analog to digital |
| AA |
atomic absorption |
| AAS |
atomic absorption spectroscopy |
| ABC |
activity-based costing |
| ABM |
activity-based management |
| AC |
alternating current; activated carbon |
| ACF |
anisotropic conductive film |
| ACI |
after-clean inspection |
| ACP |
anisotropic conductive paste |
| ACT |
alternative control techniques; actual cycle time |
| ADC |
analog-to-digital converter |
| ADE |
advanced development environment |
| ADI |
after-develop inspection |
| ADT |
applied diagnostic technique |
| ADTSEM |
Apply/Develop Track Specific Equipment Model |
| AE |
atomic emission; acousticemission; absolute ellipsometry |
| AEC |
advanced equipment controller |
| AECS |
Advanced Equipment ControlSystem; Automated Equipment Control System |
| AEI |
after-etch inspection; automated equipment interface |
| AEM |
analytical electron microscopy |
| AES |
Auger emission/electron spectroscopy |
| AFM |
atomic force microscopy |
| AFP |
abrasive-free polish |
| A-GEMTF |
Advanced GEM Task Force |
| AGV |
automated guided vehicle |
| AHF |
anhydrous hydrogen fluoride |
| AHU |
air handling unit |
| AIR |
automated image retrieval |
| Al |
aluminum |
| ALD |
atomic layer deposition |
| ALE |
atomic layer epitaxy; application logic element |
| ALS |
advanced light source; advanced low-power Schottky |
| AMC |
airborne molecular contamination |
| AMHS |
automated material handling system |
| AMT |
advanced manufacturing technology |
| AMU |
atomic mass unit |
| ANN |
artificial neural network |
| ANOVA |
analysis of variance |
| AOV |
air-operated valve |
| AP |
adhesion promoter |
| APA |
advanced performance algorithm |
| APC |
advanced process control |
| APCD |
add-on pollution control device |
| APCFI |
Advanced Process Control Framework Initiative |
| APCVD |
atmospheric pressure chemical vapor deposition |
| APEC |
advanced process equipment control |
| API |
application programming interface; atmospheric pressure ionization |
| APM |
atmospheric passivation module; acoustic plate mode |
| APRDL |
Advanced Products Research and Development Laboratory |
| aPSM |
attenuating phase-shift mask |
| AQI |
ACCESS query interface |
| AQL |
acceptable quality level |
| Ar |
argon |
| AR |
aspect ratio |
| ARAMS |
Automated Reliability |
| ARC |
antireflective coating |
| ARDE |
aspect ratio-dependent etching |
| ARPA |
Advanced Research Projects Agency (see DARPA) |
| ARS |
angle-resolved scattering |
| As |
arsenic |
| AS/RS |
automated storage and retrieval system |
| ASAP |
Advanced Stepper Application Program |
| ASIC |
application-specific integrated circuit |
| ASO |
automatic shutoff |
| ASP |
advanced strip and passivation; advanced strip processor |
| ASR |
automated send receive |
| ATDF |
Advanced ToolDevelopment Facility |
| ATE |
automatic test equipment |
| ATG |
automatic test generation |
| ATLAS |
abbreviated test language for all systems |
| atm |
atmosphere |
| ATP |
advanced technology program; adenosine triphosphate; acceptance and tool performance |
| ATR |
attenuated total reflectance |
| Att |
attenuated |
| AVP |
advanced vertical processor |
| AVS |
advanced visualization system |
| AWE |
asymptotic waveform evaluation |
| AWISPM |
above wafer in situ particle monitoring |
| AWS |
advanced wet station |
| Manufacturing |
and Science |
| Sb |
antimony |
