| C |
carbon |
| Ca |
calcium |
| CA |
CIM architecture |
| CAA |
CIM applications architecture |
| CAB |
Competitive Analysis Benchmarking |
| CAD |
computer-aided design |
| CADT |
control application development tool |
| CAE |
computer-aided engineering |
| CAI |
computer-assisted instruction |
| CAM |
computer-aided manufacturing |
| CAPS |
computer-assisted problem solving |
| CAR |
chemically amplified resist |
| CARRI |
Computerized Assessment of Relative Risk Impacts |
| CASE |
computer-aided softwareengineering; computer-aided systems engineering |
| CAT |
computer-aided testing |
| CAW |
Construction Analysis Workgroup |
| CAWC |
cryogenic aerosol wafer cleaning |
| CBGA |
ceramic ball grid array |
| CBS |
chemical bottle storage area |
| CBT |
computer-based training |
| CC |
chip carrier; cluster controller |
| CCC |
ceramic chip carrier |
| CCD |
charge-coupled device |
| CCSL |
compatible current-sinking logic |
| CCW |
counterclockwise |
| Cd |
cadmium |
| CD |
critical dimension |
| CD/OL |
critical dimension overlay |
| CDA |
clean dry air |
| CDE |
chemical downstream etch |
| CDEM |
Customer Delivery Enterprise Model |
| CDI |
collector-diffusion isolation |
| CDM |
Common Device Model for SAB |
| CDO |
controlled decomposition/oxidation |
| CDR |
chemical distribution room |
| CDS |
chemical distribution system |
| Ce |
cerium |
| CE |
capillary electrophoresis |
| CEC |
cell evaluation chip |
| CEE |
control execution environment |
| CEM |
continuous emissions monitoring |
| CER-DIP |
ceramic dual in-line package |
| CFA |
component failure analysis |
| CFC |
chlorofluorocarbon |
| CFD |
computational fluid dynamics |
| CFM |
contamination-free manufacturing |
| CIC |
cleanroom interface chamber |
| CID |
charge-injection device |
| CIE |
computer-integrated engineering |
| CIM |
computer-integrated manufacturing |
| CIM-OSA |
computer-integrated manufacturing-open systems architecture (ESPRIT program) |
| CIP |
Continuous Improvement Program |
| CIS |
Center for Integrated Systems |
| CISC |
complex instruction set computer |
| Cl |
chlorine |
| CLCC |
ceramic leaded chip carrier |
| CLIC |
closed-loop intensity control |
| CM |
configuration management; cassette module |
| CMC |
cassette module controller |
| CML |
current mode logic |
| CMM |
capability maturity model |
| CMOS |
complementary metal-oxide semiconductor |
| CMP |
chemical mechanical planarization |
| CMR |
common-mode rejection ratio; cancel move request |
| CNC |
computer numerical control; condensation nucleus counter |
| CNT |
carbon nanotube |
| Co |
cobalt |
| COB |
chip-on-board |
| COC |
cost of consumables |
| CODEC |
coder-decoder |
| COED |
computer-optimized experimental design |
| COGS |
cost of goods sold |
| CoO |
cost of ownership |
| CORBA |
common object request broker architecture |
| CORE |
composite object reference |
| COSS |
common object services specification |
| COT |
customer-owned tooling |
| CoV |
coefficient of variance |
| CPD |
concurrent product development |
| CPE |
Communications |
| CPGA |
ceramic pin grid array |
| CQFP |
ceramic quad flat pack |
| CQN |
closed-queuing network |
| Cr |
chromium |
| CRC |
cyclic redundancy check |
| CRM |
Cost/Resource Model |
| Cs |
cesium |
| CSA |
CIM systems architecture |
| CSE |
control systems engineering |
| CSF |
critical success factor |
| CSL |
current-steering logic |
| CSMA/CD |
carrier-sense |
| CSP |
chip-scale package |
| CSPED |
concurrent semiconductor production and equipment development |
| CST |
CIM systems technology |
| CSTR |
continuously stirred tank reactor |
| CSV |
comma-separated variable |
| CTC |
cluster tool controller |
| CTE |
coefficient of thermal expansion |
| CTI |
cycle time improvement |
| CTMC |
cluster tool modular communications |
| Cu |
copper |
| CUB |
central utility building |
| CUBES |
capacity utilization bottleneck efficiency system |
| CUI |
common user interface |
| CUSUM |
cumulative sum |
| CV |
capacitance-to-voltage |
| CVCM |
collected volatile condensable materials |
| CVD |
chemical vapor deposition |
| CW |
continuous wave |
| Cz |
Czochralski process |
| EQUIP |
C/I equipment control and integration |
