| EQUIP |
RTC equipment real-time control |
| R2R |
run-to-run |
| Ra |
radium |
| RAC |
remote access and control |
| RAIRS |
reflection-absorption infrared spectroscopy |
| RAM |
random access memory;reliability |
| RAMP |
Reliability Analysis and Modeling Program |
| Rb |
rubidium |
| RBS |
refractive backscattering; Rutherford backscattering spectroscopy |
| RCWA |
rigorous coupled wave analysis |
| RDR |
rotating disk reactor |
| Re |
rhenium |
| REL |
recommended exposure limit |
| RESSFOX |
recessed sealed sidewall field oxidation |
| RF |
radio frequency; resonance frequency |
| RFI |
request for information; radio frequency interference |
| RFM |
radio frequency monitoring |
| RFO |
restricted flow orifice |
| RFP |
request for plan; request for proposal; radio frequency probe |
| RGA |
residual gas analysis |
| RGV |
rail-guided vehicle |
| RH |
relative humidity |
| RI |
reliability improvement |
| RIE |
reactive ion etch |
| RISC |
reduced instruction set computer/computing |
| RIST |
rule induction and statistical testing |
| RMOS |
refractory metal-oxide semiconductor |
| RMS |
root mean square; Recipe Management Standard |
| RMTF |
Recipe Management Task Force |
| RNN |
recurrent neural network |
| RO |
reverse osmosis |
| ROC |
remote object communications |
| ROE |
return on equity |
| ROI |
return on investment |
| ROM |
read-only memory |
| RPAO |
remote plasma-assisted oxidation |
| RR |
removal rate |
| RRMSEP |
relative root mean square error of prediction |
| RSE |
reactive sputter etch |
| RSF |
relative sensitivity factor |
| RSM |
response surface methodology; response surface matrix |
| RT |
room temperature |
| RTA |
rapid thermal anneal |
| RTB |
real-time backplane |
| RTCVD |
rapid thermal chemical vapor deposition |
| RTD |
resistance temperature detector |
| RTL |
resistor-transistor logic; register transfer level |
| RTM |
rapid thermal multiprocessing |
| RTO |
rapid thermal oxidation; regenerative thermal oxidizer |
| RTP |
rapid thermal processing/processor |
| RTR |
real-time reporting |
| Ru |
ruthenium |
